Self-controlled fabrication of single-crystalline silicon nanobeams using conventional micromachining

Author: Rahafrooz Amir   Mehdizadeh Emad   Pourkamali Siavash  

Publisher: IOP Publishing

ISSN: 0957-4484

Source: Nanotechnology, Vol.25, Iss.31, 2014-08, pp. : 315303-315309

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