Non-Lithographic Silicon Micromachining Using Inkjet and Chemical Etching

Author： Hoshian Sasha   Gaspar Cristina   Vasara Teemu   Jahangiri Farzin   Jokinen Ville   Franssila Sami  

Publisher： MDPI

E-ISSN： 2072-666x|7|12|222-222

ISSN： 2072-666x

Source： Micromachines, Vol.7, Iss.12, 2016-12, pp. : 222-222

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