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Author: Sun Tangyou Xu Zhimou Xu Haifeng Zhao Wenning Wu Xinghui Liu Sisi He Jian Liu Shiyuan Peng Jing
Publisher: IOP Publishing
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.23, Iss.12, 2013-12, pp. : 125002-125008
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