Large-scale membrane transfer process: its application to single-crystal-silicon continuous membrane deformable mirror

Author: Wu Tong   Sasaki Takashi   Akiyama Masayuki   Hane Kazuhiro  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.23, Iss.12, 2013-12, pp. : 125003-125013

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