Photonic crystal structures on nonflat surfaces fabricated by dry lift-off soft UV nanoimprint lithography

Author： Sun Tangyou Xu Zhimou Xu Haifeng Zhao Wenning Wu Xinghui Liu Sisi He Jian Liu Shiyuan Peng Jing

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.23, Iss.12, 2013-12, pp. : 125002-125008

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