Enhanced mechanical performance of AlN/nanodiamond micro-resonators

Author: Heidrich N   Iankov D   Hees J   Pletschen W   Sah R E   Kirste L   Zuerbig V   Nebel C   Ambacher O   Lebedev V  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.23, Iss.12, 2013-12, pp. : 125017-125022

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Related content