Electrostatic cantilever resonators under a double-sided pull–pull drive scheme

Author： Yan Xiaojun   Qi Mingjing   Wu Xiaoming   Wang Pengbo   Pu Juan   Lin Liwei  

Publisher： IOP Publishing

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.24, Iss.3, 2014-03, pp. : 35004-35010

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