Reducing Pull-In Voltage by Adjusting Gap Shape in Electrostatically Actuated Cantilever and Fixed-Fixed Beams

Author： Haluzan Darcy T.   Klymyshyn David M.   Achenbach Sven   Börner Martin  

Publisher： MDPI

E-ISSN： 2072-666x|1|2|68-81

ISSN： 2072-666x

Source： Micromachines, Vol.1, Iss.2, 2010-07, pp. : 68-81

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