Fabrication of micro/nanotubes by mask-based diffraction lithography

Author: Tan Xianhua   Shi Tielin   Gao Yang   Sheng Wenjun   Sun Bo   Liao Guanglan  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.5, 2014-05, pp. : 55006-55012

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