Fabrication of microlens arrays with varied focal lengths on curved surfaces using an electrostatic deformed template

Author: Sun Hongda   Deng Shengfeng   Cui Xiaobin   Lu Miao  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.6, 2014-06, pp. : 65008-65013

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