High resolution micro ultrasonic machining for trimming 3D microstructures

Author: Viswanath Anupam   Li Tao   Gianchandani Yogesh  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.6, 2014-06, pp. : 65017-65024

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