3D micro- and nano-machining of hydrogenated amorphous silicon films on SiO₂/Si and glass substrates

Author： Soleimani-Amiri S Zanganeh S Ramzani R Talei R Mohajerzadeh S Azimi S Sanaee Z

E-ISSN： 1361-6439|25|7|74004-74012

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.7, 2015-07, pp. : 74004-74012

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