Fabrication and analysis of awl-shaped serpentine microsprings for large out-of-plane displacement

Author： Chou Hui-Min   Lin Meng-Ju   Chen Rongshun  

Publisher： IOP Publishing

E-ISSN： 1361-6439|25|9|95018-95029

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.9, 2015-09, pp. : 95018-95029

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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