Investigation of atomic oxygen density in a capacitively coupled O2/SF6 discharge using two-photon absorption laser-induced fluorescence spectroscopy and a Langmuir probe

Author: Kechkar S   Swift P   Conway J   Turner M   Daniels S  

Publisher: IOP Publishing

ISSN: 0963-0252

Source: Plasma Sources Science and Technology, Vol.22, Iss.4, 2013-08, pp. : 45013-45021

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