Time-resolved ion flux, electron temperature and plasma density measurements in a pulsed Ar plasma using a capacitively coupled planar probe

Author: Darnon Maxime   Cunge Gilles   Braithwaite Nicholas St J  

Publisher: IOP Publishing

ISSN: 0963-0252

Source: Plasma Sources Science and Technology, Vol.23, Iss.2, 2014-04, pp. : 25002-25010

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