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IOP Publishing

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Measurements of ion energy distributions in a dual-frequency capacitively coupled plasma for Ar/O 2 discharges

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Absolute OH density measurements in the effluent of a cold atmospheric-pressure Ar–H₂O RF plasma jet in air

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Spectroscopic Measurements of Electron Temperature and Electron Density in Electron Beam Plasma Generator Based on Collisional Radiative Model

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Dry Etching Characteristics of ZrO2 Thin Films Using High Density Cl2/Ar Plasma

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