Effects of Boron Doping on the Properties of Ultrananocrystalline Diamond Films

Author: Yuan Wen-Xiang   WU Q.   Luo Z.   Wu H.  

Publisher: Springer Publishing Company

ISSN: 1543-186X

Source: Journal of Electronic Materials, Vol.43, Iss.4, 2014-04, pp. : 1302-1306

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