Ultraviolet lithography on sloped surfaces utilizing diamond turned holograms

Author： Brinksmeier Ekkard   Vollertsen Frank   Riemer Oltmann   Koerdt Michael   Meier Axel   Kibben Simon   Möller Jan  

Publisher： Springer Publishing Company

ISSN： 0944-6524

Source： Production Engineering, Vol.7, Iss.6, 2013-11, pp. : 619-627

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