A new hybrid fabrication process for a high sensitivity MEMS microphone

Author： Chao Paul   Tsai Chun-Yin   Chiu Chi-Wei   Tsai Che-Hung   Tu Tse-Yi  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.19, Iss.9-10, 2013-09, pp. : 1425-1431

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

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