Design of bossed silicon membranes for high sensitivity microphone applications

Author: Martins P.   Beclin S.   Brida S.   Metivet S.   Stojanovic O.   Malhaire C.  

Publisher: Springer Publishing Company

ISSN: 0946-7076

Source: Microsystem Technologies, Vol.13, Iss.11-12, 2007-07, pp. : 1495-1500

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