Novel and low reflective silicon surface fabricated by Ni-assisted electroless etching and coated with atomic layer deposited Al2O3 film

Author： Yue Zhihao   Shen Honglie   Jiang Ye   Wang Wei   Jin Jiale  

Publisher： Springer Publishing Company

ISSN： 0947-8396

Source： Applied Physics A, Vol.114, Iss.3, 2014-03, pp. : 813-817

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