The protection of MgO film against hydration by using Al 2 O 3 capping layer deposited by magnetron sputtering method

Author： Hwan Eun J.   Heon Lee J.   Gil Kim S.   Yoon Um M.   Young Park S.   Joon Kim H.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.435, Iss.1, 2003-07, pp. : 199-204

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