Electrical characterization of thin Al 2 O 3 films grown by atomic layer deposition on silicon and various metal substrates

Author： Groner M.D.   Elam J.W.   Fabreguette F.H.   George S.M.  

Publisher： Elsevier

ISSN： 0040-6090

Source： Thin Solid Films, Vol.413, Iss.1, 2002-06, pp. : 186-197

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