Defects in SiC substrates and epitaxial layers affecting semiconductor device performance

Author: Müller St. G.   Sumakeris J. J.   Brady M. F.   Glass R. C.   Hobgood H. McD.   Jenny J. R.   Leonard R.   Malta D. P.   Paisley M. J.   Powell A. R.   Tsvetkov V. F.   Allen S. T.   Das M. K.   Palmour J. W.   Carter C. H.  

Publisher: Edp Sciences

E-ISSN: 1286-0050|27|1-3|29-35

ISSN: 1286-0042

Source: EPJ Applied Physics (The), Vol.27, Iss.1-3, 2010-03, pp. : 29-35

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Abstract