From photon emission microscopy to Raman spectroscopy: Failure analysis in microelectronics

Author： De Wolf I.   Rasras M.  

Publisher： Edp Sciences

E-ISSN： 1286-0050|27|1-3|59-65

ISSN： 1286-0042

Source： EPJ Applied Physics (The), Vol.27, Iss.1-3, 2010-03, pp. : 59-65

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