Atomic force microscopy: a powerful tool for surface defect and morphology inspection in semiconductor industry

Author： Borionetti G.   Bazzali A.   Orizio R.  

Publisher： Edp Sciences

E-ISSN： 1286-0050|27|1-3|101-106

ISSN： 1286-0042

Source： EPJ Applied Physics (The), Vol.27, Iss.1-3, 2010-03, pp. : 101-106

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