Deuteron implantation into hexagonal silicon carbide: defects and deuterium behaviour

Author： Shiryaev A.   van Veen A.   Rivera A.   van Huis M.   Bus T.   Arnoldbik W. M.   Tomozeiu N.   Habraken F. H. P. M.   Delamare R.   Ntsoenzok E.  

Publisher： Edp Sciences

E-ISSN： 1286-0050|23|1|11-18

ISSN： 1286-0042

Source： EPJ Applied Physics (The), Vol.23, Iss.1, 2002-11, pp. : 11-18

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