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Author: Yang Yi-ling Wei Yan-ding Lou Jun-qiang Xie Feng-ran Fu Lei
Publisher: IOP Publishing
E-ISSN: 1361-6439|26|1|15005-15023
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.26, Iss.1, 2016-01, pp. : 15005-15023
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Abstract
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