Design and fabrication of an electrohydrodynamically actuated microlens with areal density modulated electrodes

E-ISSN： 1361-6439|26|1|15004-15012

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.26, Iss.1, 2016-01, pp. : 15004-15012

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