Soft X-ray lithography of high aspect ratio SU8 submicron structures

By Reznikova Elena  

Microsystem Technologies, Vol. 14, Iss. 9-11, 2008-10 ,pp. : 1683-1688

Springer Publishing Company

Access to resources Recommend Favorite

Investigations of SU-8 removal from metallic high aspect ratio microstructures with a novel plasma technique

By Engelke Rainer  

Microsystem Technologies, Vol. 14, Iss. 9-11, 2008-10 ,pp. : 1607-1612

Springer Publishing Company

Access to resources Recommend Favorite

SOI wafer mold with high-aspect-ratio microstructures for hot embossing process

By Zhao Y.   Cui T.  

Microsystem Technologies, Vol. 10, Iss. 6-7, 2004-10 ,pp. : 544-546

Springer Publishing Company

Access to resources Recommend Favorite

Process research of high aspect ratio microstructure using SU-8 resist

By Liu J.   Cai B.   Zhu J.   Ding G.   Zhao X.   Yang C.   Chen D.  

Microsystem Technologies, Vol. 10, Iss. 4, 2004-05 ,pp. : 265-268

Springer Publishing Company

Access to resources Recommend Favorite

Application of inclined-exposure and thick film process for high aspect-ratio micro-structures on polymer optic devices

By Hung Kuo-Yung  

Microsystem Technologies, Vol. 14, Iss. 9-11, 2008-10 ,pp. : 1217-1222

Springer Publishing Company

Access to resources Recommend Favorite