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Period of time: 2004年5期
Publisher: Springer Publishing Company
Founded in: 1995
Total resources: 27
ISSN: 0946-7076
Subject: TP Automation Technology , Computer Technology
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Microsystem Technologies,volume 10,issue 5
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By Courtois Bernard,Michel Bernd in (2004)
Microsystem Technologies,volume 10,issue 5 , Vol. 10, Iss. 5, 2004-08 , pp.![](/images/ico/ico5.png)
“Plug-up”–a new concept for fabricating SOI MEMS devices
By Kiihamäki J.,Dekker J.,Pekko P.,Kattelus H.,Sillanpää T.,Mattila T. in (2004)
Microsystem Technologies,volume 10,issue 5 , Vol. 10, Iss. 5, 2004-08 , pp.![](/images/ico/ico5.png)
New electroforming technology pressure aid for LIGA process
By Tsai T.-H.,Yang H.,Chein R. in (2004)
Microsystem Technologies,volume 10,issue 5 , Vol. 10, Iss. 5, 2004-08 , pp.![](/images/ico/ico5.png)
SU8 resist plasma etching and its optimisation
By Hong G.,Holmes A.S.,Heaton M.E. in (2004)
Microsystem Technologies,volume 10,issue 5 , Vol. 10, Iss. 5, 2004-08 , pp.![](/images/ico/ico5.png)
Thin film formation on non-planar surface with use of spray coating fabrication
By Ichiki M.,Zhang L.,Yang Z.,Ikehara T.,Maeda R. in (2004)
Microsystem Technologies,volume 10,issue 5 , Vol. 10, Iss. 5, 2004-08 , pp.![](/images/ico/ico5.png)
Self-aligned 0-level sealing of MEMS devices by a two layer thin film reflow process
By Witvrouw A.,Rusu C.,Jansen H.,Gunn R. in (2004)
Microsystem Technologies,volume 10,issue 5 , Vol. 10, Iss. 5, 2004-08 , pp.![](/images/ico/ico5.png)
Bonding of polymer microstructures by UV irradiation and subsequent welding at low temperatures
By Truckenmüller R.,Henzi P.,Herrmann D.,Saile V.,Schomburg W.K. in (2004)
Microsystem Technologies,volume 10,issue 5 , Vol. 10, Iss. 5, 2004-08 , pp.![](/images/ico/ico5.png)
Modular parametric finite element modelling for reliability-studies in electronic and mems packaging
By Wunderle B.,Auersperg J.,Großer V.,Kaulfersch E.,Wittler O.,Michel B. in (2004)
Microsystem Technologies,volume 10,issue 5 , Vol. 10, Iss. 5, 2004-08 , pp.![](/images/ico/ico5.png)
By Fonseca L.,Cabruja E.,Calaza C.,Rubio R.,Santander J.,Figueras E.,Gràcia I.,Cané C.,Moreno M.,Marco S. in (2004)
Microsystem Technologies,volume 10,issue 5 , Vol. 10, Iss. 5, 2004-08 , pp.![](/images/ico/ico5.png)
Dynamic modeling of interactions between fields and matter in MEMS devices
By Zeng K.,Liu Z.,Korvink J.G. in (2004)
Microsystem Technologies,volume 10,issue 5 , Vol. 10, Iss. 5, 2004-08 , pp.