Microsystem Technologies,volume 10,issue 5  (08-2004)

Period of time: 2004年5期

Publisher: Springer Publishing Company

Founded in: 1995

Total resources: 27

ISSN: 0946-7076

Subject: TP Automation Technology , Computer Technology

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Microsystem Technologies,volume 10,issue 5

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“Plug-up”–a new concept for fabricating SOI MEMS devices

By Kiihamäki J.,Dekker J.,Pekko P.,Kattelus H.,Sillanpää T.,Mattila T. in (2004)

Microsystem Technologies,volume 10,issue 5 , Vol. 10, Iss. 5, 2004-08 , pp. 346-350

Springer Publishing Company

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Feasibility of a flip-chip approach to integrate an IR filter and an IR detector in a future gas detection cell

By Fonseca L.,Cabruja E.,Calaza C.,Rubio R.,Santander J.,Figueras E.,Gràcia I.,Cané C.,Moreno M.,Marco S. in (2004)

Microsystem Technologies,volume 10,issue 5 , Vol. 10, Iss. 5, 2004-08 , pp. 382-386

Springer Publishing Company

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