Ensuring repeatability in LIGA mold insert fabrication

Author： Schulz J.   Bade K.   Guttmann M.   Hahn L.   Janssen A.   Köhler U.   Meyer P.   Winkler F.  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.10, Iss.5, 2004-08, pp. : 419-422

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