Micro-electro-mechanical systems fast fabrication by selective thick polysilicon growth in epitaxial reactor

Author: Sagazan O.   Denoual M.   Guil P.   Gaudin D.   Bonnaud O.  

Publisher: Springer Publishing Company

ISSN: 0946-7076

Source: Microsystem Technologies, Vol.12, Iss.10-11, 2006-09, pp. : 953-958

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