Micro-ball lens array fabrication in photoresist using PTFE hydrophobic effect

Author： Shyu Ruey   Yang Hsiharng   Tsai Wen-Ren   Tsai Jhy-Cherng  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.13, Iss.11-12, 2007-07, pp. : 1601-1606

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