Concave microlens array mold fabrication in photoresist using UV proximity printing

Author： Lin Tsung-Hung   Yang Hsiharng   Chao Ching-Kong  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.13, Iss.11-12, 2007-07, pp. : 1537-1543

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