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Period of time: 2007年3-4期
Publisher: Springer Publishing Company
Founded in: 1995
Total resources: 27
ISSN: 0946-7076
Subject: TP Automation Technology , Computer Technology
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Microsystem Technologies,volume 13,issue 3-4
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HARMST, High Aspect Ratio Micro Structure Technology Workshop, Gyenogju, Korea, 10–13 June 2005
By Kwon Tai,Michel Bernd in (2007)
Microsystem Technologies,volume 13,issue 3-4 , Vol. 13, Iss. 3-4, 2007-02 , pp.![](/images/ico/ico5.png)
Geometrical strengthening and tip-sharpening of a microneedle array fabricated by X-ray lithography
By Khumpuang Sommawan,Horade Mitsuhiro,Fujioka Kazuya,Sugiyama Susumu in (2007)
Microsystem Technologies,volume 13,issue 3-4 , Vol. 13, Iss. 3-4, 2007-02 , pp.![](/images/ico/ico5.png)
Mask design compensation for sloped sidewall structures fabricated by X-ray lithography
By Horade Mitsuhiro,Khumpuang Sommawan,Fujioka Kazuya,Sugiyama Susumu in (2007)
Microsystem Technologies,volume 13,issue 3-4 , Vol. 13, Iss. 3-4, 2007-02 , pp.![](/images/ico/ico5.png)
Fabrication of high aspect ratio nano gratings using SR lithography
By Kato Fumiki,Fujinawa Shinya,Li Yigui,Sugiyama Susumu in (2007)
Microsystem Technologies,volume 13,issue 3-4 , Vol. 13, Iss. 3-4, 2007-02 , pp.![](/images/ico/ico5.png)
By Li Yigui,Sugiyama Susumu in (2007)
Microsystem Technologies,volume 13,issue 3-4 , Vol. 13, Iss. 3-4, 2007-02 , pp.![](/images/ico/ico5.png)
High aspect ratio tapered hollow metallic microneedle arrays with microfluidic interconnector
By Kim Kabseog,Lee Jeong-Bong in (2007)
Microsystem Technologies,volume 13,issue 3-4 , Vol. 13, Iss. 3-4, 2007-02 , pp.![](/images/ico/ico5.png)
By Lu Hong,Pillans Brandon,Lee Jong-Chang,Lee Jeong-Bong in (2007)
Microsystem Technologies,volume 13,issue 3-4 , Vol. 13, Iss. 3-4, 2007-02 , pp.![](/images/ico/ico5.png)
SU-8 3D microoptic components fabricated by inclined UV lithography in water
Microsystem Technologies,volume 13,issue 3-4 , Vol. 13, Iss. 3-4, 2007-02 , pp.![](/images/ico/ico5.png)
In situ fabrication of SU-8 movable parts by using PAG-diluted SU-8 as the sacrificial layer
Microsystem Technologies,volume 13,issue 3-4 , Vol. 13, Iss. 3-4, 2007-02 , pp.![](/images/ico/ico5.png)
Processing-microstructure-resulting materials properties of LIGA Ni
By Lian K.,Jiang J.,Ling Z. in (2007)
Microsystem Technologies,volume 13,issue 3-4 , Vol. 13, Iss. 3-4, 2007-02 , pp.