Out-of-plane motion of 260-nm thick guided-mode resonant grating filter controlled by four micro-thermal actuators

Author: Kanamori Yoshiaki   Kitani Takashi   Hane Kazuhiro  

Publisher: Springer Publishing Company

ISSN: 0946-7076

Source: Microsystem Technologies, Vol.13, Iss.8-10, 2007-05, pp. : 867-872

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