Germanium resistors for RF MEMS based microsystems

Author： Grenier K.   Bordas C.   Pinaud S.   Salvagnac L.   Dubuc D.  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.14, Iss.4-5, 2008-04, pp. : 601-606

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