Fabrication of RF MEMS variable capacitors by deep X-ray lithography and electroplating

Author: Achenbach Sven   Klymyshyn David   Haluzan Darcy   Mappes Timo   Wells Garth   Mohr Jürgen  

Publisher: Springer Publishing Company

ISSN: 0946-7076

Source: Microsystem Technologies, Vol.13, Iss.3-4, 2007-02, pp. : 343-347

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