Effect of nitrogen addition on the elastic and structural properties of amorphous carbon thin films

Author: Valentini L.   Kenny J.M.   Carlotti G.   Guerrieri M.   Signorelli G.   Lozzi L.   Santucci S.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.389, Iss.1, 2001-06, pp. : 315-320

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Abstract