Analysis of thin impurity doped layers in anodic alumina and anodic tantala films by glow discharge time-of-flight mass spectrometry

Author： Molchan I. S.   Thompson G. E.   Skeldon P.   Trigoulet N.   Tempez A.   Chapon P.  

Publisher： Maney Publishing

ISSN： 0020-2967

Source： Transactions of the Institute of Metal Finishing, Vol.88, Iss.3, 2010-05, pp. : 154-157

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