Effect of nitrogen ion implantation on structural and microstructural properties of reactive magnetron sputtered TiN thin films

Author： Subramanian B   Ananthakumar R   Kobayashi A   Jayachandran M  

Publisher： Maney Publishing

ISSN： 0020-2967

Source： Transactions of the Institute of Metal Finishing, Vol.89, Iss.1, 2011-01, pp. : 28-32

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