Fluid simulation of inductively coupled Ar/O2 plasmas: Comparisons with experiment

Author： Yan-Hui Wang Liu Wei Yu-Ru Zhang You-Nian Wang

E-ISSN： 1741-4199|24|9|95203-95210

ISSN： 1674-1056

Source： Chinese Physics B, Vol.24, Iss.9, 2015-09, pp. : 95203-95210

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