Analysis of Magnetron-Deposited Titanium Oxynitride Coatings by Scanning Electron Microscopy and Raman Scattering
Publisher: Trans Tech Publications
E-ISSN: 1662-8985|2015|1084|3-6
ISSN: 1022-6680
Source: Advanced Materials Research, Vol.2015, Iss.1084, 2015-02, pp. : 3-6
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Abstract