A straightforward and CMOS-compatible nanofabrication technique of periodic SiO2 nanohole arrays

Author： He Xiaobin   Gao Jianfeng   Li Junjie   Wei Yayi   Yan Jiang   Meng Lingkuan  

Publisher： IOP Publishing

E-ISSN： 1361-6528|26|41|415303-415308

ISSN： 0957-4484

Source： Nanotechnology, Vol.26, Iss.41, 2015-10, pp. : 415303-415308

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