The application of an assisting gas plasma generator for low- temperature magnetron sputtering of Ti-C-Mo-S antifriction coatings on titanium alloys

Publisher： IOP Publishing

E-ISSN： 1742-6596|652|1|318-323

ISSN： 1742-6596

Source： Journal of Physics: Conference Series , Vol.652, Iss.1, 2015-11, pp. : 318-323

Access to resources Favorite

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Related content

Magnetron sputtering system for coatings deposition with activation of working gas mixture by low-energy high-current electron beam

By  

Journal of Physics: Conference Series , Vol. 652, Iss. 1, 2015-11 ,pp. : 132-137

IOP Publishing

Access to resources Recommend Favorite

Reactive magnetron sputtering model at making Ti-TiOx coatings

By  

Journal of Physics: Conference Series , Vol. 567, Iss. 1, 2014-11 ,pp. : 130-133

IOP Publishing

Access to resources Recommend Favorite

Structure and properties of commercially pure titanium nitrided in the plasma of a low-pressure gas discharge produced by a PINK plasma generator

By  

Journal of Physics: Conference Series , Vol. 652, Iss. 1, 2015-11 ,pp. : 68-73

IOP Publishing

Access to resources Recommend Favorite

Low-Temperature Deposition of nc-SiOx:H below 400°C Using Magnetron Sputtering

By Yun Li   Chen-Chen Yin   Yun Ji   Zhen-Liang Shi   Cong-Hui Jin   Wei Yu   Xiao-Wei Li  

Chinese Physics Letters, Vol. 32, Iss. 4, 2015-04 ,pp. : 46802-46805

IOP Publishing

Access to resources Recommend Favorite

Low temperature deposition of low stress silicon nitride by reactive magnetron sputtering

By  

Journal of Physics: Conference Series , Vol. 370, Iss. 1, 2012-06 ,pp. : 130-134

IOP Publishing

Access to resources Recommend Favorite