Low-Temperature Deposition of nc-SiO_x:H below 400°C Using Magnetron Sputtering

Author： Yun Li Chen-Chen Yin Yun Ji Zhen-Liang Shi Cong-Hui Jin Wei Yu Xiao-Wei Li

E-ISSN： 1741-3540|32|4|46802-46805

ISSN： 0256-307X

Source： Chinese Physics Letters, Vol.32, Iss.4, 2015-04, pp. : 46802-46805

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