Author: Jeon H J Kim D I Kim M J Nguyen X D Park D H Go J S
Publisher: IOP Publishing
E-ISSN: 1361-6439|25|11|114001-114007
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.11, 2015-11, pp. : 114001-114007
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Abstract
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