Scalable fabrication of carbon-based MEMS/NEMS and their applications: a review

Author： Jiang Shulan Shi Tielin Zhan Xiaobin Xi Shuang Long Hu Gong Bo Li Junjie Cheng Siyi Huang Yuanyuan Tang Zirong

E-ISSN： 1361-6439|25|11|113001-113018

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.11, 2015-11, pp. : 113001-113018

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS Actuators

By Du Han Chau Fook Siong Zhou Guangya

Micromachines, Vol. 7, Iss. 4, 2016-04 ,pp. : 69-69

MDPI

Access to resources Recommend Favorite

Principle and applications of MEMS: a review

By Mahalik N.P.

International Journal of Manufacturing Technology and Management, Vol. 13, Iss. 2-3, 2008-01 ,pp. : 324-343

Inderscience Publishers

Access to resources Recommend Favorite

Observation of a carbon-based protective layer on the sidewalls of boron doped ultrananocrystalline diamond-based MEMS during in situ tribotests

Journal of Micromechanics and Microengineering, Vol. 25, Iss. 12, 2015-12 ,pp. : 125020-125034

IOP Publishing

Access to resources Recommend Favorite

MEMS fabrication

By Huff Michael

Sensor Review, Vol. 22, Iss. 1, 2002-02 ,pp. : 18-33

Emerald Group Publishing Ltd

Access to resources Recommend Favorite

Fabrication of (100) Orientated PZT Thin Films for MEMS Applications

By Zhao Hong-Jin Ren Tian-Ling Liu Jian-She Liu Li-Tian Li Zhi-Jian

Integrated Ferroelectrics, Vol. 46, Iss. 1, 2002-01 ,pp. : 79-86

Taylor & Francis Ltd

Access to resources Recommend Favorite