A semi-analytical modeling approach for laterally-vibrating thin-film piezoelectric-on-silicon micromechanical resonators

Author: Tu Cheng   Lee Joshua E-Y  

Publisher: IOP Publishing

E-ISSN: 1361-6439|25|11|115020-115031

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.11, 2015-11, pp. : 115020-115031

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Abstract