Author: Tu Cheng Lee Joshua E-Y
Publisher: IOP Publishing
E-ISSN: 1361-6439|25|11|115020-115031
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.11, 2015-11, pp. : 115020-115031
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Abstract
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